Electrical characterization of semiconducting oxide nanowire and its application to a chemical sensor

Jonghyurk Park, S. E. Moon, Eun Kyung Kim, H. Y. Lee, K. H. Park, G. T. Kim

Research output: Contribution to journalConference articlepeer-review

Abstract

Semiconducting oxide nanowire devices were fabricated using more convenient way to combine photolithography and e-beam lithography, and their electrical properties were studied. To realize the reliable device operation which is a key factor for a chemical sensor, the contact resistance should be optimized. Here, we studied the contact resistance problem under post-deposition annealing or etching process using scanning probe microscopic tool to analyze IV spectroscopic and surface potential behaviors. And, its performance as a chemical sensor was also studied for several gas species. copyright The Electrochemical Society.

Original languageEnglish
Pages (from-to)231-237
Number of pages7
JournalECS Transactions
Volume3
Issue number10
DOIs
Publication statusPublished - 2006
EventChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: 2006 Oct 292006 Nov 3

ASJC Scopus subject areas

  • Engineering(all)

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