Electrical fatigues in oxygen plasma-treated sol-gel-derived lead-zirconate-titanate films

Hyuk Kyoo Jang, Cheol Eui Lee, Seung Jeong Noh

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Abstract

Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.

Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume39
Issue number11 A
Publication statusPublished - 2000 Nov 1

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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