Abstract
Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.
| Original language | English |
|---|---|
| Journal | Japanese Journal of Applied Physics |
| Volume | 39 |
| Issue number | 11 A |
| Publication status | Published - 2000 Nov 1 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Jang, H. K., Lee, C. E., & Noh, S. J. (2000). Electrical fatigues in oxygen plasma-treated sol-gel-derived lead-zirconate-titanate films. Japanese Journal of Applied Physics, 39(11 A).