Abstract
Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.
| Original language | English |
|---|---|
| Journal | Japanese Journal of Applied Physics |
| Volume | 39 |
| Issue number | 11 A |
| Publication status | Published - 2000 Nov 1 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Electrical fatigues in oxygen plasma-treated sol-gel-derived lead-zirconate-titanate films. / Jang, Hyuk Kyoo; Lee, Cheol Eui; Noh, Seung Jeong.
In: Japanese Journal of Applied Physics, Vol. 39, No. 11 A, 01.11.2000.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Electrical fatigues in oxygen plasma-treated sol-gel-derived lead-zirconate-titanate films
AU - Jang, Hyuk Kyoo
AU - Lee, Cheol Eui
AU - Noh, Seung Jeong
PY - 2000/11/1
Y1 - 2000/11/1
N2 - Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.
AB - Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.
UR - http://www.scopus.com/inward/record.url?scp=0034318570&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0034318570&partnerID=8YFLogxK
M3 - Article
VL - 39
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 11 A
ER -