Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.
|Journal||Japanese journal of applied physics|
|Issue number||11 A|
|Publication status||Published - 2000 Nov 1|
ASJC Scopus subject areas
- Physics and Astronomy(all)