Electrical fatigues in oxygen plasma-treated sol-gel-derived lead-zirconate-titanate films

Hyuk Kyoo Jang, Cheol Eui Lee, Seung Jeong Noh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.

Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume39
Issue number11 A
Publication statusPublished - 2000 Nov 1

Fingerprint

oxygen plasma
Sol-gels
Lead
Fatigue of materials
gels
Plasmas
Oxygen
Remanence
Sol-gel process
cycles
Ferroelectric materials
polarization
thin films
Thin films

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Electrical fatigues in oxygen plasma-treated sol-gel-derived lead-zirconate-titanate films. / Jang, Hyuk Kyoo; Lee, Cheol Eui; Noh, Seung Jeong.

In: Japanese Journal of Applied Physics, Vol. 39, No. 11 A, 01.11.2000.

Research output: Contribution to journalArticle

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AB - Effects of O2-plasma on the electrical fatigue characteristics in ferroelectric [Pb(Zrx, Ti1-x)O3] (PZT) films prepared by a sol-gel method were investigated. Before and after oxygen plasma treatment, the switched remanent polarization decreased to 59% and 76% of the initial value, respectively, when electrical stress was applied by 108 switching cycles. Thus, oxygen plasma treatment is shown to be a simple and effective method of reducing electrical fatigues in PZT thin films.

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