Electrical properties and microstructural characterization of single ZnO nanowire sensor manufactured by FIB

Sang Won Yoon, Jong Hyun Seo, Kyou Hyun Kim, Jae Pyoung Ahn, Tae Yeon Seong, Kon Bae Lee, Hoon Kwon

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The devices using individual ZnO nanowire have been manufactured by FIB. Its specific resistance and microstructural characterization has been investigated using nano manipulator and transmission electron microscopy (TEM) observations. The specific resistance was 0.2-0.4 Ω cm. With increasing the RTA temperature, the specific resistance began to be decreased and was abruptly decreased at the RTA temperature above 500 °C. The Pt junction of as-manufactured device consisted of the Pt nanoparticles of 5 nm and the amorphous carbon of 9.1 wt.%. After RTA, the size of Pt nanoparticles grew up to 100 nm, the contents of carbon were decreased within the Pt junction, and the conductivity was enhanced due to Au diffusion into the Pt junction. It was strongly suggested that the contents of carbon is the most important factor for the electrical enhancement.

Original languageEnglish
Pages (from-to)4003-4006
Number of pages4
JournalThin Solid Films
Volume517
Issue number14
DOIs
Publication statusPublished - 2009 May 29

Keywords

  • Conductivity
  • Electrical resistance
  • FIB
  • Pt deposition
  • Single nanowire sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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