Electrical Properties of a 0.95(Na 0.5 K 0.5) NbO 3-0.05 CaTiO 3 Thin Film Grown on a Pt / Ti / SiO 2/ Si Substrate

Youn Seon Lee, In Tae Seo, Bo Yun Kim, Sahn Nahm, Chong-Yun Kang, Young Hun Jeong, Jong Hoo Paik

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Abstract

An amorphous phase was formed in a 0.95(Na0.5K0.5)NbO3-0.05CaTiO3 (NKN-CT) film grown at 300°C, and a low-temperature transient Ca2Nb2O7 phase was formed in the film grown at 500°C. In films grown at high temperatures (≥600°C), secondary phases such as K5.75Nb10.85O30 and K4Ti10Nb2O27 were developed without the formation of a NKN-CT phase, probably because of Na2O evaporation. The same secondary phases were formed in the film grown at 300°C and subsequently annealed at 850°C under an air atmosphere. However, a homogeneous NKN-CT phase was formed in films grown at 300°C and subsequently annealed at 830°C-880°C under the K2O and Na2O atmospheres. Moreover, the film annealed at 830°C in particular exhibited good electric and piezoelectric properties, including a high dielectric constant of 747 with a low dissipation factor of 0.93% at 100 kHz, low leakage current density of 2.0 × 10-7 A/cm2 at 0.1 MV/cm, and high Pr and d33 values of 15.4 μC/cm2 and 124 pm/V at 100 kV/cm, respectively.

Original languageEnglish
Pages (from-to)2892-2896
Number of pages5
JournalJournal of the American Ceramic Society
Volume97
Issue number9
DOIs
Publication statusPublished - 2014 Sep 1

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ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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