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Dive into the research topics of 'Electrical properties of La <sub>2</sub> O <sub>3</sub> thin films grown on TiN/Si substrates via atomic layer deposition'. Together they form a unique fingerprint.
Chemical Compounds
lanthanum oxide
Atomic layer deposition
Electric properties
Thin films
Annealing
Substrates
dipivaloylmethane
Metals
Lanthanum
Structural properties
Leakage currents
Crystalline materials
Permittivity
Current density
Temperature
Capacitors
Engineering & Materials Science
Atomic layer deposition
Electric properties
Thin films
Annealing
Substrates
Lanthanum
Metals
Structural properties
Leakage currents
Crystalline materials
Permittivity
Current density
Temperature
Capacitors
Physics & Astronomy
atomic layer epitaxy
electrical properties
thin films
annealing
lanthanum
metals
capacitors
leakage
insulators
current density
permittivity
temperature