Electrical properties of La 2 O 3 thin films grown on TiN/Si substrates via atomic layer deposition

Nam Kyun Park, Dong Kyun Kang, Byong Ho Kim, Sang Jin Jo, Jeong Sook Ha

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Electrical properties of La 2 O 3 thin films grown on TiN/Si substrates via atomic layer deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds