Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

Han Ki Kim, Tae Yeon Seong, Jae Hong Lim, Won Cho, Young Soo Yoon

Research output: Contribution to journalArticle

132 Citations (Scopus)

Abstract

The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O2/(Ar+O2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films.

Original languageEnglish
Pages (from-to)167-171
Number of pages5
JournalJournal of Power Sources
Volume102
Issue number1-2
DOIs
Publication statusPublished - 2001 Dec 1

Keywords

  • Capacitance
  • CoO
  • Gas-ratio
  • LiPON electrolyte
  • Supercapacitor
  • Thin-film

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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