Electrochemical properties of Sn-substituted LiMn2O4 thin films prepared by radio-frequency magnetron sputtering

Woo Yeon Kong, Haena Yim, Seok Jin Yoon, Sahn Nahm, Ji Won Choi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


The LiMn2O4 and LiSn0.0125Mn 1.975O4 thin films were grown on Pt/Ti/SiO2/Si (100) substrate by RF magnetron sputtering. To obtain the structural stability and good cycle performance, deposition parameters, namely working pressure, sputtering gas ratio of Ar and O2, post-annealing temperature were established. The structure and surface morphology of thin films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The electrochemical properties were estimated by two electrode half-cell test with WBCS 3000 (Wonatech, Korea) at constant current rate of 1 C-rate. The Sn substituted LiMn2O4 thin film deposited at 10 mtorr with mixture of argon and oxygen (Ar/O2 = 3/1) and then annealed at 500 °C in O2 atmosphere showed good cycle performance. The Sn substituted LiMn2O4 thin films showed larger capacity of ~30 μAh/μm-cm2 and higher cyclability than LiMn2O4 thin films.

Original languageEnglish
Pages (from-to)3288-3292
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Issue number5
Publication statusPublished - 2013 May


  • Capacity
  • Cyclability
  • LiMnO
  • RF magnetron sputtering
  • Thin film battery

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics


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