Electrostatic control and its analysis of roller transferring processes in FPD manufacturing

Dong Sun Kim, Chun Bae Lim, Sung Hyuk Yoon, Seung Won Jung, Du Seok Oh, Jung Tae Kim, Hyung Tae Kim, Won Joon Ho, Soo Youle Cha, Joshua Yoo, Kwang S. Suh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In recent years, the structure of a-Si based TFTs have been getting more complex and glass transferring by conveyor rollers during each process were increased accordingly. Static electricity in transferring processes is becoming a major issue because most companies to pursue high productivity. In this paper, we analyzed a point defect which was induced by electrostatic discharge event in transferring processes. Based on the analysis, we proposed the effect of ionization to minimize triboelectric charge in glass transferring systems.

Original languageEnglish
Title of host publicationElectrical Overstress/Electrostatic Discharge Symposium Proceedings, EOS/ESD 2013
Publication statusPublished - 2013 Oct 16
Event2013 35th Electrical Overstress/Electrostatic Discharge Symposium, EOS/ESD 2013 - Las Vegas, NV, United States
Duration: 2013 Sep 82013 Sep 13

Publication series

NameElectrical Overstress/Electrostatic Discharge Symposium Proceedings
ISSN (Print)0739-5159

Other

Other2013 35th Electrical Overstress/Electrostatic Discharge Symposium, EOS/ESD 2013
CountryUnited States
CityLas Vegas, NV
Period13/9/813/9/13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Kim, D. S., Lim, C. B., Yoon, S. H., Jung, S. W., Oh, D. S., Kim, J. T., Kim, H. T., Ho, W. J., Cha, S. Y., Yoo, J., & Suh, K. S. (2013). Electrostatic control and its analysis of roller transferring processes in FPD manufacturing. In Electrical Overstress/Electrostatic Discharge Symposium Proceedings, EOS/ESD 2013 [6635942] (Electrical Overstress/Electrostatic Discharge Symposium Proceedings).