Electrostatic spring effect on the dynamic performance of microresonators

E. H. Francis Tay, R. Kumaran, B. L. Chua, V. J. Logeeswaran

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite element results. Possible causes of the discrepancy from tapered cross section of the flexure beams, dimensional variations and electrostatic spring effects are discussed and shown to contribute to the significant difference between analytical and experimental values. IntelliCAD™ electrostatic simulation was done to isolate the electrostatic spring effect and compared with the experimental observations. The compliance due to AC voltage has also been observed in DRIE resonators.

Original languageEnglish
Title of host publication2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
EditorsM. Laudon, B. Romanowicz
Pages154-157
Number of pages4
Publication statusPublished - 2000
Externally publishedYes
Event2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 - San Diego, CA, United States
Duration: 2000 Mar 272000 Mar 29

Publication series

Name2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Other

Other2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
CountryUnited States
CitySan Diego, CA
Period00/3/2700/3/29

Keywords

  • Electrostatic spring effect
  • Natural frequency
  • Resonator
  • Simulation
  • Uncertainty analysis

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Francis Tay, E. H., Kumaran, R., Chua, B. L., & Logeeswaran, V. J. (2000). Electrostatic spring effect on the dynamic performance of microresonators. In M. Laudon, & B. Romanowicz (Eds.), 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 (pp. 154-157). (2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000).