Electrostatically vacuum sealed tunneling magnetic field sensors

H. W. Park, Byeong Kwon Ju, D. J. Lee, J. H. Park, M. H. Oh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work reports the tunneling effects of the lateral field emitters. Tunneling effect is applicable to the VMFS(vacuum magnetic field sensors). VMFS uses the fact that the trajectory of the emitted electrons are curved by the magnetic field due to Lorentz force. Poly-silicon cantilevers were used as field emitters and anode materials. Thickness of the emitter and the anode were 2μm, respectively. PSG(phospho-silicate-glass) was used as a sacrificial layer and it was etched by HF. Cantilevers were doped with POCl 3(10 20cm 3). 2μm-thick cantilevers were fabricated onto PSG(2μm-thick). Sublimation drying method was used at releasing step to avoid stiction. Then, the device was vacuum sealed. Device was fixed to a sodalime-glass#1 with silver paste and it was wire bonded. Glass#1 has a predefined hole and a sputtered silicon-film at backside. The front-side of the device was sealed with a sodalime-glass#2 using the glass frit. After getter insertion via the hole, backside of the glass#1 was sealed electrostatically with a sodalime-glass#3 at 10 -6 torr. After sealing, getter was activated. Sealing was successful to operate the tunneling device. The packaged VMFS showed reduced emission current compared with the chamber test prior to sealing. The emission currents were changed when the magnetic field was induced. A VMFS of angular anodes were tested and its sensitivity was about 3%.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsD. Abbott, V.K. Varadan, K.F. Boehringer
Pages36-43
Number of pages8
Volume4236
DOIs
Publication statusPublished - 2001
Externally publishedYes
EventSmart Electronics and MEMS II - Melbourne, VIC, Australia
Duration: 2000 Dec 132000 Dec 15

Other

OtherSmart Electronics and MEMS II
CountryAustralia
CityMelbourne, VIC
Period00/12/1300/12/15

Fingerprint

Vacuum
Magnetic fields
Glass
vacuum
glass
sensors
Sensors
magnetic fields
sealing
Anodes
emitters
anodes
Silicates
Hermetic devices
silicates
frit
stiction
Stiction
test chambers
Silicon

Keywords

  • Anodic bonding
  • Cantilever
  • Field emission
  • Hermetic sealing
  • Magnetic field sensor
  • Stiction
  • Tunneling
  • Vacuum bonding
  • VMFS

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Park, H. W., Ju, B. K., Lee, D. J., Park, J. H., & Oh, M. H. (2001). Electrostatically vacuum sealed tunneling magnetic field sensors. In D. Abbott, V. K. Varadan, & K. F. Boehringer (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4236, pp. 36-43) https://doi.org/10.1117/12.418776

Electrostatically vacuum sealed tunneling magnetic field sensors. / Park, H. W.; Ju, Byeong Kwon; Lee, D. J.; Park, J. H.; Oh, M. H.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / D. Abbott; V.K. Varadan; K.F. Boehringer. Vol. 4236 2001. p. 36-43.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, HW, Ju, BK, Lee, DJ, Park, JH & Oh, MH 2001, Electrostatically vacuum sealed tunneling magnetic field sensors. in D Abbott, VK Varadan & KF Boehringer (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4236, pp. 36-43, Smart Electronics and MEMS II, Melbourne, VIC, Australia, 00/12/13. https://doi.org/10.1117/12.418776
Park HW, Ju BK, Lee DJ, Park JH, Oh MH. Electrostatically vacuum sealed tunneling magnetic field sensors. In Abbott D, Varadan VK, Boehringer KF, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4236. 2001. p. 36-43 https://doi.org/10.1117/12.418776
Park, H. W. ; Ju, Byeong Kwon ; Lee, D. J. ; Park, J. H. ; Oh, M. H. / Electrostatically vacuum sealed tunneling magnetic field sensors. Proceedings of SPIE - The International Society for Optical Engineering. editor / D. Abbott ; V.K. Varadan ; K.F. Boehringer. Vol. 4236 2001. pp. 36-43
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