Emission characteristics of the Mo-coated silicon tips

Heung Woo Park, Byeong Kwon Ju, Jae Hoon Jung, Yun-Hi Lee, Jung ho Park, In Jae Chung, M. R. Hascard, Myung Hwan Oh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsM.K. Hatalis, J. Kanicki, C.J. Summers, F. Funada
PublisherMaterials Research Society
Pages371-374
Number of pages4
Volume424
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1996 Apr 81996 Apr 12

Other

OtherProceedings of the 1996 MRS Spring Meeting
CitySan Francisco, CA, USA
Period96/4/896/4/12

Fingerprint

Silicon
Molybdenum
Reactive ion etching
Current voltage characteristics
Field emission
Vacuum
Oxidation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Park, H. W., Ju, B. K., Jung, J. H., Lee, Y-H., Park, J. H., Chung, I. J., ... Oh, M. H. (1996). Emission characteristics of the Mo-coated silicon tips. In M. K. Hatalis, J. Kanicki, C. J. Summers, & F. Funada (Eds.), Materials Research Society Symposium - Proceedings (Vol. 424, pp. 371-374). Materials Research Society.

Emission characteristics of the Mo-coated silicon tips. / Park, Heung Woo; Ju, Byeong Kwon; Jung, Jae Hoon; Lee, Yun-Hi; Park, Jung ho; Chung, In Jae; Hascard, M. R.; Oh, Myung Hwan.

Materials Research Society Symposium - Proceedings. ed. / M.K. Hatalis; J. Kanicki; C.J. Summers; F. Funada. Vol. 424 Materials Research Society, 1996. p. 371-374.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, HW, Ju, BK, Jung, JH, Lee, Y-H, Park, JH, Chung, IJ, Hascard, MR & Oh, MH 1996, Emission characteristics of the Mo-coated silicon tips. in MK Hatalis, J Kanicki, CJ Summers & F Funada (eds), Materials Research Society Symposium - Proceedings. vol. 424, Materials Research Society, pp. 371-374, Proceedings of the 1996 MRS Spring Meeting, San Francisco, CA, USA, 96/4/8.
Park HW, Ju BK, Jung JH, Lee Y-H, Park JH, Chung IJ et al. Emission characteristics of the Mo-coated silicon tips. In Hatalis MK, Kanicki J, Summers CJ, Funada F, editors, Materials Research Society Symposium - Proceedings. Vol. 424. Materials Research Society. 1996. p. 371-374
Park, Heung Woo ; Ju, Byeong Kwon ; Jung, Jae Hoon ; Lee, Yun-Hi ; Park, Jung ho ; Chung, In Jae ; Hascard, M. R. ; Oh, Myung Hwan. / Emission characteristics of the Mo-coated silicon tips. Materials Research Society Symposium - Proceedings. editor / M.K. Hatalis ; J. Kanicki ; C.J. Summers ; F. Funada. Vol. 424 Materials Research Society, 1996. pp. 371-374
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