Emission characteristics of the Mo-coated silicon tips

Heung Woo Park, Byeong Kwon Ju, Jae Hoon Jung, Yun-Hi Lee, Jung ho Park, In Jae Chung, M. R. Hascard, Myung Hwan Oh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsM.K. Hatalis, J. Kanicki, C.J. Summers, F. Funada
PublisherMaterials Research Society
Pages371-374
Number of pages4
Volume424
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1996 Apr 81996 Apr 12

Other

OtherProceedings of the 1996 MRS Spring Meeting
CitySan Francisco, CA, USA
Period96/4/896/4/12

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Park, H. W., Ju, B. K., Jung, J. H., Lee, Y-H., Park, J. H., Chung, I. J., Hascard, M. R., & Oh, M. H. (1996). Emission characteristics of the Mo-coated silicon tips. In M. K. Hatalis, J. Kanicki, C. J. Summers, & F. Funada (Eds.), Materials Research Society Symposium - Proceedings (Vol. 424, pp. 371-374). Materials Research Society.