Emission characteristics of the Mo-coated silicon tips

Heung Woo Park, Byeong Kwon Ju, Jae Hoon Jung, Yun Hi Lee, Jung Ho Park, In Jae Chung, M. R. Hascard, Myung Hwan Oh

Research output: Contribution to journalConference article

Abstract

Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

Original languageEnglish
Pages (from-to)371-374
Number of pages4
JournalMaterials Research Society Symposium - Proceedings
Volume424
DOIs
Publication statusPublished - 1996
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1996 Apr 81996 Apr 12

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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