Emission characteristics of the molybdenum-coated silicon field emitter array

Heung Woo Park, Byeong Kwon Ju, Yun Hi Lee, Jung Ho Park, Myung Hwan Oh

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the reoxidation sharpening. Molybdenum was coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were tested in the high vacuum level. Turn-on voltage of the uncoated tip was 35V and maximum current was 1 mA, while turn-on voltage of the coated tip was 15 V and maximum current was 6 mA. While uncoated silicon tip was destroyed after 13 minutes after operation and showed rapid lowering of emission current, coated tip showed stable emission characteristics. Obtained currents were proved to be field emission currents using the Fowler-Nordheim plot studies.

Original languageEnglish
Pages (from-to)L1301-L1304
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume35
Issue number10 PART A
DOIs
Publication statusPublished - 1996 Oct 1

Keywords

  • Current fluctuation
  • Fowler-Nordheim
  • Reactive ion etching
  • Sharpening
  • Tip

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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