Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

Jae Hee Han, Sun Hong Choi, Tae Young Lee, Ji Beom Yoo, Chong Yun Park, T. W. Jung, H. J. Kim, Y. J. Park, I. T. Han, J. N. Huh, Jong Heun Lee, SeGi G. Yu, W. K. Yi, G. S. Park, N. S. Lee, J. M. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Vertically aligned carbon nanotubes (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH3 as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (Eto) of 1.75 V/μm while CNT grown on invar under the same condition showed larger Eto. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Vacuum Microelectronics Conference, IVMC
Pages33-34
Number of pages2
Publication statusPublished - 2001 Dec 1
Externally publishedYes
EventProceedings of the 14th International Vacuum Microelectronics Conference - Davis, CA, United States
Duration: 2001 Aug 122001 Aug 16

Other

OtherProceedings of the 14th International Vacuum Microelectronics Conference
CountryUnited States
CityDavis, CA
Period01/8/1201/8/16

ASJC Scopus subject areas

  • Surfaces and Interfaces

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  • Cite this

    Han, J. H., Choi, S. H., Lee, T. Y., Yoo, J. B., Park, C. Y., Jung, T. W., Kim, H. J., Park, Y. J., Han, I. T., Huh, J. N., Lee, J. H., Yu, S. G., Yi, W. K., Park, G. S., Lee, N. S., & Kim, J. M. (2001). Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO. In Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC (pp. 33-34)