Emission stability of DLC coated metal-tips FEA

Jae Hoon Jung, Byeong Kwon Ju, Yun-Hi Lee, Kyu Chang Park, Jin Jang, Yu Ho Jung, Chul Ju Kim, Myung Hwan Oh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We have improved an emission stability of Mo tips FEA (field emitter array). The effect of DLC (Diamond Like Carbon) films coated by layer-by-layer technique using PECVD on the electron emission characteristics of Mo tips FEA is examined. Turn-on voltage was lowered from 80 V for Mo tips to 65 V for DLC coated Mo tips FEA and maximum emission current was increased from 140 μA for Mo tips to 320 μA for DLC coated Mo tips FEA. An anode current for DLC coated Mo tips and Mo tips FEA of 0.1 μA per emitter are measured at the gate voltage of about 87 V and 107 V, respectively. And the emission current of DLC coated Mo tips FEA was more stable than that of Mo tips FEA.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Vacuum Microelectronics Conference, IVMC
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages231-234
Number of pages4
Publication statusPublished - 1996 Dec 1
Externally publishedYes
EventProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia
Duration: 1996 Jul 71996 Jul 12

Other

OtherProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC
CitySt.Petersburg, Russia
Period96/7/796/7/12

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ASJC Scopus subject areas

  • Surfaces and Interfaces

Cite this

Jung, J. H., Ju, B. K., Lee, Y-H., Park, K. C., Jang, J., Jung, Y. H., Kim, C. J., & Oh, M. H. (1996). Emission stability of DLC coated metal-tips FEA. In Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC (pp. 231-234). IEEE.