Enhanced field emission properties from carbon nanotube emitters on the nanopatterned substrate

Young Cho Kim, Se Jung Kim, Seol Ah Park, Byeong Kwon Ju

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The authors investigated the field emission characteristics of printed carbon nanotubes (CNTs) on KOVAR substrates with micro- and nanosize line patterns. Microsized line patterns were fabricated using photolithography techniques followed by an inductive coupled plasma-reactive ion etching process, and laser interference lithography techniques were used to fabricate uniform nanosized patterns over a relatively large area. CNTs were printed on the patterned substrate using a screen printing method. The field emission characteristics of each patterned substrate were compared to those of a nonpatterned substrate. Results revealed that varying the pattern size has an influence on the field emission characteristics. The reduction of the pattern size results in an increase in the total surface area. This surface patterning is found to provide additional areas for CNTs to adhere to the substrates, which, in turn, results in better adhesion of CNTs. As the size of the pattern is reduced, the field emission properties are improved. Specifically, substrates with nanosized patterns exhibited both the lowest turn-on field and the highest field enhancement factor (β).

Original languageEnglish
Article number011802
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume35
Issue number1
DOIs
Publication statusPublished - 2017 Jan 1

Fingerprint

Carbon Nanotubes
Field emission
field emission
Carbon nanotubes
emitters
carbon nanotubes
Substrates
Screen printing
Plasma etching
Reactive ion etching
Photolithography
Lithography
photolithography
printing
Adhesion
adhesion
lithography
etching
Lasers
interference

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Enhanced field emission properties from carbon nanotube emitters on the nanopatterned substrate. / Kim, Young Cho; Kim, Se Jung; Park, Seol Ah; Ju, Byeong Kwon.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 35, No. 1, 011802, 01.01.2017.

Research output: Contribution to journalArticle

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