Enhanced performance of microbolometer using coupled feed horn antenna

Kuntae Kim, Jong Yeon Park, Ho Kwan Kang, Jong Oh Park, Sung Moon, Jung ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the paper, we improved the performance of the microbolometer using coupled feed horn antenna. The response time of the device was improved by reducing thermal time constant as the area of the absorption layer was reduced. We designed the shape of an absorption layer as circular structure in order to reduce the coupling loss between the antenna and the bolometer. A supporting leg for thermal isolation also has circular structure and its length increased up to 82 μm, it reduced the thermal conductance to 4.65×10 -8[W/K]. The directivity of the designed antenna has 20.8 dB. So the detectivity of the bolometer was improved to 2.37×10 -9 [cm√Hz/W] as the noise characteristics of the bolometer was enhanced by coupling feed horn antenna. The fabrication of the bolometer are carried out by a surface micromachining method that uses a polyimide as a sacrificial layer. The absorption layer material of the bolometer is VO x and its TCR value has above 2%/K. The 3-D feed horn antenna structure can be constructed by using a PMER negative photoresist. The antenna and the bolometer can be bonded by Au-Au flip chip bonding method.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.C. Chiao, L. Faraone, H. Barry Harrison, A.M. Shkel
Pages388-395
Number of pages8
Volume4592
DOIs
Publication statusPublished - 2001
Externally publishedYes
EventDevice and Process Technologies for MEMS and Microelectronics II - Adelaide, Australia
Duration: 2001 Dec 172001 Dec 19

Other

OtherDevice and Process Technologies for MEMS and Microelectronics II
CountryAustralia
CityAdelaide
Period01/12/1701/12/19

Fingerprint

horn antennas
Horn antennas
Bolometers
Antenna feeders
bolometers
antennas
Antennas
Surface micromachining
directivity
Photoresists
micromachining
polyimides
photoresists
Polyimides
time constant
isolation
chips
Fabrication
fabrication
Hot Temperature

Keywords

  • Antenna coupled
  • Detectivity
  • Feed horn antenna
  • Microbolometer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Kim, K., Park, J. Y., Kang, H. K., Park, J. O., Moon, S., & Park, J. H. (2001). Enhanced performance of microbolometer using coupled feed horn antenna. In J. C. Chiao, L. Faraone, H. Barry Harrison, & A. M. Shkel (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4592, pp. 388-395) https://doi.org/10.1117/12.448992

Enhanced performance of microbolometer using coupled feed horn antenna. / Kim, Kuntae; Park, Jong Yeon; Kang, Ho Kwan; Park, Jong Oh; Moon, Sung; Park, Jung ho.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.C. Chiao; L. Faraone; H. Barry Harrison; A.M. Shkel. Vol. 4592 2001. p. 388-395.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, K, Park, JY, Kang, HK, Park, JO, Moon, S & Park, JH 2001, Enhanced performance of microbolometer using coupled feed horn antenna. in JC Chiao, L Faraone, H Barry Harrison & AM Shkel (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4592, pp. 388-395, Device and Process Technologies for MEMS and Microelectronics II, Adelaide, Australia, 01/12/17. https://doi.org/10.1117/12.448992
Kim K, Park JY, Kang HK, Park JO, Moon S, Park JH. Enhanced performance of microbolometer using coupled feed horn antenna. In Chiao JC, Faraone L, Barry Harrison H, Shkel AM, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4592. 2001. p. 388-395 https://doi.org/10.1117/12.448992
Kim, Kuntae ; Park, Jong Yeon ; Kang, Ho Kwan ; Park, Jong Oh ; Moon, Sung ; Park, Jung ho. / Enhanced performance of microbolometer using coupled feed horn antenna. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.C. Chiao ; L. Faraone ; H. Barry Harrison ; A.M. Shkel. Vol. 4592 2001. pp. 388-395
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