Enhanced performance of microbolometer using coupled feed horn antenna

Kuntae Kim, Jong Yeon Park, Ho Kwan Kang, Jong Oh Park, Sung Moon, Jung ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the paper, we improved the performance of the microbolometer using coupled feed horn antenna. The response time of the device was improved by reducing thermal time constant as the area of the absorption layer was reduced. We designed the shape of an absorption layer as circular structure in order to reduce the coupling loss between the antenna and the bolometer. A supporting leg for thermal isolation also has circular structure and its length increased up to 82 μm, it reduced the thermal conductance to 4.65×10 -8[W/K]. The directivity of the designed antenna has 20.8 dB. So the detectivity of the bolometer was improved to 2.37×10 -9 [cm√Hz/W] as the noise characteristics of the bolometer was enhanced by coupling feed horn antenna. The fabrication of the bolometer are carried out by a surface micromachining method that uses a polyimide as a sacrificial layer. The absorption layer material of the bolometer is VO x and its TCR value has above 2%/K. The 3-D feed horn antenna structure can be constructed by using a PMER negative photoresist. The antenna and the bolometer can be bonded by Au-Au flip chip bonding method.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.C. Chiao, L. Faraone, H. Barry Harrison, A.M. Shkel
Pages388-395
Number of pages8
Volume4592
DOIs
Publication statusPublished - 2001
Externally publishedYes
EventDevice and Process Technologies for MEMS and Microelectronics II - Adelaide, Australia
Duration: 2001 Dec 172001 Dec 19

Other

OtherDevice and Process Technologies for MEMS and Microelectronics II
CountryAustralia
CityAdelaide
Period01/12/1701/12/19

Keywords

  • Antenna coupled
  • Detectivity
  • Feed horn antenna
  • Microbolometer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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  • Cite this

    Kim, K., Park, J. Y., Kang, H. K., Park, J. O., Moon, S., & Park, J. H. (2001). Enhanced performance of microbolometer using coupled feed horn antenna. In J. C. Chiao, L. Faraone, H. Barry Harrison, & A. M. Shkel (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4592, pp. 388-395) https://doi.org/10.1117/12.448992