Enhanced performance of microbolometer using coupled feed horn antenna

Kuntae Kim, Jong Yeon Park, Ho Kwan Kang, Jong Oh Park, Sung Moon, Jung Ho Park

Research output: Contribution to journalConference articlepeer-review


In the paper, we improved the performance of the microbolometer using coupled feed horn antenna. The response time of the device was improved by reducing thermal time constant as the area of the absorption layer was reduced. We designed the shape of an absorption layer as circular structure in order to reduce the coupling loss between the antenna and the bolometer. A supporting leg for thermal isolation also has circular structure and its length increased up to 82 μm, it reduced the thermal conductance to 4.65×10-8[W/K]. The directivity of the designed antenna has 20.8 dB. So the detectivity of the bolometer was improved to 2.37×10-9 [cm√Hz/W] as the noise characteristics of the bolometer was enhanced by coupling feed horn antenna. The fabrication of the bolometer are carried out by a surface micromachining method that uses a polyimide as a sacrificial layer. The absorption layer material of the bolometer is VOx and its TCR value has above 2%/K. The 3-D feed horn antenna structure can be constructed by using a PMER negative photoresist. The antenna and the bolometer can be bonded by Au-Au flip chip bonding method.

Original languageEnglish
Pages (from-to)388-395
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
EventDevice and Process Technologies for MEMS and Microelectronics II - Adelaide, Australia
Duration: 2001 Dec 172001 Dec 19


  • Antenna coupled
  • Detectivity
  • Feed horn antenna
  • Microbolometer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Enhanced performance of microbolometer using coupled feed horn antenna'. Together they form a unique fingerprint.

Cite this