Abstract
We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.
| Original language | English |
|---|---|
| Title of host publication | Technical Digest - International Electron Devices Meeting |
| Editors | Anon |
| Publisher | IEEE |
| Pages | 293-296 |
| Number of pages | 4 |
| Publication status | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1996 IEEE International Electron Devices Meeting - San Francisco, CA, USA Duration: 1996 Dec 8 → 1996 Dec 11 |
Other
| Other | Proceedings of the 1996 IEEE International Electron Devices Meeting |
|---|---|
| City | San Francisco, CA, USA |
| Period | 96/12/8 → 96/12/11 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating. / Jung, J. H.; Ju, Byeong Kwon; Lee, Yun-Hi; Oh, M. H.; Jang, J.
Technical Digest - International Electron Devices Meeting. ed. / Anon. IEEE, 1996. p. 293-296.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating
AU - Jung, J. H.
AU - Ju, Byeong Kwon
AU - Lee, Yun-Hi
AU - Oh, M. H.
AU - Jang, J.
PY - 1996
Y1 - 1996
N2 - We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.
AB - We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.
UR - http://www.scopus.com/inward/record.url?scp=0030384443&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0030384443&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0030384443
SP - 293
EP - 296
BT - Technical Digest - International Electron Devices Meeting
A2 - Anon, null
PB - IEEE
ER -