Abstract
We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.
| Original language | English |
|---|---|
| Pages (from-to) | 293-296 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting |
| Publication status | Published - 1996 |
| Event | Proceedings of the 1996 IEEE International Electron Devices Meeting - San Francisco, CA, USA Duration: 1996 Dec 8 → 1996 Dec 11 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry