Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating

J. H. Jung, B. K. Ju, Y. H. Lee, M. H. Oh, J. Jang

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.

Original languageEnglish
Pages (from-to)293-296
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
Publication statusPublished - 1996
EventProceedings of the 1996 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 1996 Dec 81996 Dec 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating'. Together they form a unique fingerprint.

  • Cite this