Enhancement of emission characteristics for field-emitter arrays by optimizing the etched feature of the gate electrode

Hoon Kim, Sang Won Seo, Joo Won Lee, Jong Won Park, Yun Hi Lee, Jin Jang, Byeong Kwon Ju

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The crystallographic orientations of sputtered Cr films as a function of substrate temperature Ts were characterized by SEM, XRD, and estimation of etched features. It was found that the tapering angle θt of thin Cr films after reactive ion etching depends on the deposition conditions. In the case of nontapered-gated FEAs, emission properties were enhanced.

Original languageEnglish
Pages (from-to)186-192
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number1 SPEC.
DOIs
Publication statusPublished - 2003 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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