Environmental Ozone Effect on the Growth of Hemispherical Grained Silicon for ULSI DRAM Stacked Capacitor

Young Kyou Park, Hyun Joon Kim, Dong Won Kim, Jung Ho Park

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Environmental Ozone Effect on the Growth of Hemispherical Grained Silicon for ULSI DRAM Stacked Capacitor'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds