Epitaxial growth of sol-gel PLZT thin films

Dae Sung Yoon, Chang Jung Kim, Joon Sung Lee, Won Jong Lee, Kwangsoo No

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Abstract

Epitaxial lead lanthanum zirconate titanate [PLZT(9/50/50)J thin films were fabricated on various single crystal substrates using the spin coating of metallo-organic solutions. The films were heat-treated at 700 °C for 1 h using the direct insertion method. The films were epitaxially grown with (100), (100), and (110) being parallel to the SrTiO3(100), the MgO(lOO), and the sapphire (0112) substrates, respectively. The epitaxy of the films was investigated using x-ray diffraction, pole figures, rocking curves, and scanning electron microscopy.

Original languageEnglish
Pages (from-to)420-425
Number of pages6
JournalJournal of Materials Research
Volume9
Issue number2
DOIs
Publication statusPublished - 1994 Jan 1
Externally publishedYes

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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