The fabrication of Er-doped amorphous SiOx films by laser ablation of a Si:Er2O3 target in He atmosphere was discussed. A time-of-flight quadrupole mass spectroscopy was adopted to obtain kinetic energies of ionic species in a plume produced by laser ablation. It was found that the photoluminscence intensity at 1.54 μm was highly dependent on the oxygen content in the film.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)