Er3+ photoluminescence from Er-doped amorphous SiOx films prepared by pulsed laser deposition at room temperature: The effects of oxygen concentration

Jeong Sook Ha, Chang Hyun Bae, Sang Hwan Nam, Seung Min Park, Young Rae Jang, Keon Ho Yoo, Kyoungwan Park

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

The fabrication of Er-doped amorphous SiOx films by laser ablation of a Si:Er2O3 target in He atmosphere was discussed. A time-of-flight quadrupole mass spectroscopy was adopted to obtain kinetic energies of ionic species in a plume produced by laser ablation. It was found that the photoluminscence intensity at 1.54 μm was highly dependent on the oxygen content in the film.

Original languageEnglish
Pages (from-to)3436-3438
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number20
DOIs
Publication statusPublished - 2003 May 19

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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