Er3+ photoluminescence from Er-doped amorphous SiOx films prepared by pulsed laser deposition at room temperature: The effects of oxygen concentration

Jeong Sook Ha; Chang Hyun Bae; Sang Hwan Nam; Seung Min Park; Young Rae Jang; Keon Ho Yoo; Kyoungwan Park

doi:10.1063/1.1573335

Er³⁺ photoluminescence from Er-doped amorphous SiO_x films prepared by pulsed laser deposition at room temperature: The effects of oxygen concentration

Jeong Sook Ha, Chang Hyun Bae, Sang Hwan Nam, Seung Min Park, Young Rae Jang, Keon Ho Yoo, Kyoungwan Park

Department of Chemical and Biological Engineering

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

The fabrication of Er-doped amorphous SiO_x films by laser ablation of a Si:Er₂O₃ target in He atmosphere was discussed. A time-of-flight quadrupole mass spectroscopy was adopted to obtain kinetic energies of ionic species in a plume produced by laser ablation. It was found that the photoluminscence intensity at 1.54 μm was highly dependent on the oxygen content in the film.

Original language	English
Pages (from-to)	3436-3438
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	20
DOIs	https://doi.org/10.1063/1.1573335
Publication status	Published - 2003 May 19

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1573335

Cite this

@article{a818bfecb69f4f2bbf5f297642347f15,

title = "Er3+ photoluminescence from Er-doped amorphous SiOx films prepared by pulsed laser deposition at room temperature: The effects of oxygen concentration",

abstract = "The fabrication of Er-doped amorphous SiOx films by laser ablation of a Si:Er2O3 target in He atmosphere was discussed. A time-of-flight quadrupole mass spectroscopy was adopted to obtain kinetic energies of ionic species in a plume produced by laser ablation. It was found that the photoluminscence intensity at 1.54 μm was highly dependent on the oxygen content in the film.",

author = "Ha, {Jeong Sook} and Bae, {Chang Hyun} and Nam, {Sang Hwan} and Park, {Seung Min} and Jang, {Young Rae} and Yoo, {Keon Ho} and Kyoungwan Park",

year = "2003",

month = may,

day = "19",

doi = "10.1063/1.1573335",

language = "English",

volume = "82",

pages = "3436--3438",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "20",

}

TY - JOUR

T1 - Er3+ photoluminescence from Er-doped amorphous SiOx films prepared by pulsed laser deposition at room temperature

T2 - The effects of oxygen concentration

AU - Ha, Jeong Sook

AU - Bae, Chang Hyun

AU - Nam, Sang Hwan

AU - Park, Seung Min

AU - Jang, Young Rae

AU - Yoo, Keon Ho

AU - Park, Kyoungwan

PY - 2003/5/19

Y1 - 2003/5/19

N2 - The fabrication of Er-doped amorphous SiOx films by laser ablation of a Si:Er2O3 target in He atmosphere was discussed. A time-of-flight quadrupole mass spectroscopy was adopted to obtain kinetic energies of ionic species in a plume produced by laser ablation. It was found that the photoluminscence intensity at 1.54 μm was highly dependent on the oxygen content in the film.

AB - The fabrication of Er-doped amorphous SiOx films by laser ablation of a Si:Er2O3 target in He atmosphere was discussed. A time-of-flight quadrupole mass spectroscopy was adopted to obtain kinetic energies of ionic species in a plume produced by laser ablation. It was found that the photoluminscence intensity at 1.54 μm was highly dependent on the oxygen content in the film.

UR - http://www.scopus.com/inward/record.url?scp=0037643642&partnerID=8YFLogxK

U2 - 10.1063/1.1573335

DO - 10.1063/1.1573335

M3 - Article

AN - SCOPUS:0037643642

SN - 0003-6951

VL - 82

SP - 3436

EP - 3438

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 20

ER -

Er³⁺ photoluminescence from Er-doped amorphous SiO_x films prepared by pulsed laser deposition at room temperature: The effects of oxygen concentration

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this