Er3+ photoluminescence from Er-doped silicon-rich silicon oxide films deposited by laser ablation of a Si

Er target in an oxygen atmosphere

Jeong Sook Ha, Young Rae Jang, Keon Ho Yoo, Chang Hyun Bae, Sang Hwan Nam, Ji Seon Jeon, Seung Min Park

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have developed a new pulsed laser deposition method for fabricating Er-doped silicon-rich silicon oxide (SRSO:Er) films. A target composed of a pure Si disk and an Er metal strip was ablated by a line-focused laser beam in oxygen atmosphere. The oxygen concentration that determines the relative concentrations of the three phases (Si-Si, SiOx, and SiO2) in the film was easily controlled by varying the ambient oxygen pressure. The photoluminescence intensity at 1.54 μm from Er3+ ions was strongly dependent on the amount of the Si-Si phase in the SRSO:Er films.

Original languageEnglish
Pages (from-to)1541-1544
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number4 A
Publication statusPublished - 2004 Apr 1

Fingerprint

Silicon oxides
Laser ablation
silicon oxides
laser ablation
Oxide films
oxide films
Photoluminescence
photoluminescence
atmospheres
Silicon
Oxygen
silicon
oxygen
metal strips
Strip metal
Pulsed laser deposition
pulsed laser deposition
Laser beams
laser beams
Ions

Keywords

  • 1.54μm photoluminescence
  • Er-doped silicon
  • Pulsed laser deposition

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Er3+ photoluminescence from Er-doped silicon-rich silicon oxide films deposited by laser ablation of a Si : Er target in an oxygen atmosphere. / Ha, Jeong Sook; Jang, Young Rae; Yoo, Keon Ho; Bae, Chang Hyun; Nam, Sang Hwan; Jeon, Ji Seon; Park, Seung Min.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 4 A, 01.04.2004, p. 1541-1544.

Research output: Contribution to journalArticle

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AU - Nam, Sang Hwan

AU - Jeon, Ji Seon

AU - Park, Seung Min

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