Etched surface morphology of heteroepitaxial nonpolar (11 2 0) and semipolar (11 2 2) GaN films by photoenhanced chemical wet etching

Kwang Hyeon Baik, Hoo Young Song, Sung Min Hwang, Younghun Jung, Jaehui Ahn, Ji Hyun Kim

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

We investigated how selective wet etching changes the surface morphologies of nonpolar a-plane (11 2 0) and semipolar (11 2 2) GaN films grown on sapphire substrates. Trigonal prisms with various widths are seen on the top surface and the tapered sidewall facet of the a-plane GaN films along the c-axis direction. Inclined trigonal unit cells are observed on the semipolar (11 2 2) GaN films after wet etching. The specific crystallographic planes of (10 1 0), (01 1 0), and (0001) were exposed in common for both the GaN films, indicating that these planes are chemically stable due to atomic bond configurations and smaller density of atoms. Photoenhanced chemical wet etching proceeds on the a-plane and semipolar GaN films until chemically stable m-plane GaN surfaces as well as c-plane GaN surfaces are exposed.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume158
Issue number4
DOIs
Publication statusPublished - 2011 Apr 29

Fingerprint

Wet etching
Surface morphology
etching
Aluminum Oxide
Prisms
Sapphire
prisms
flat surfaces
sapphire
Atoms
Substrates
configurations
cells
atoms

ASJC Scopus subject areas

  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Renewable Energy, Sustainability and the Environment
  • Condensed Matter Physics

Cite this

Etched surface morphology of heteroepitaxial nonpolar (11 2 0) and semipolar (11 2 2) GaN films by photoenhanced chemical wet etching. / Baik, Kwang Hyeon; Song, Hoo Young; Hwang, Sung Min; Jung, Younghun; Ahn, Jaehui; Kim, Ji Hyun.

In: Journal of the Electrochemical Society, Vol. 158, No. 4, 29.04.2011.

Research output: Contribution to journalArticle

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AU - Kim, Ji Hyun

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