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Evaluating mechanical properties of 100nm-thick atomic layer deposited Al2O3 as a free-standing film
Junmo Koo, Sangmin Lee, Junmo Kim, Dong Hwan Kim, Byoung Ho Choi, Taek Soo Kim, Joon Hyung Shim
Research output: Contribution to journal › Article › peer-review
4
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(Scopus)