Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors

S. I. Moon, D. J. Lee, Y. T. Jang, Soo-Won Kim, Yun-Hi Lee, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH3 gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH3 gases. Also, recovery time of CNT gas sensor is measured according to temperature.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages127-130
Number of pages4
Volume1
ISBN (Print)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Carbon nanotubes
  • Electric resistance
  • Electric variables measurement
  • Electrical resistance measurement
  • Gas detectors
  • Mechanical systems
  • Micromechanical devices
  • Organic materials
  • Temperature measurement
  • Temperature sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Moon, S. I., Lee, D. J., Jang, Y. T., Kim, S-W., Lee, Y-H., & Ju, B. K. (2003). Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 127-130). [1215269] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215269