Evolution of surface morphology in the initial stage of nitridation of the Si(111)-7 × 7 surface by nitrogen ions

Jeong Sook Ha, Kang Ho Park, Wan Soo Yun, El Hang Lee, Seong Ju Park

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Fingerprint Dive into the research topics of 'Evolution of surface morphology in the initial stage of nitridation of the Si(111)-7 × 7 surface by nitrogen ions'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy