Exact locating of sub-surface microelectronic structures using scanning thermal wave microscopy

Jaehun Chung, Kyeongtae Kim, Gwangseok Hwang, Ohmyoung Kwon, Joon Sik Lee, Seungho Park, Young Ki Choi

Research output: Contribution to journalConference articlepeer-review

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Mathematics

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy