Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing

Dae Ryook Yang, Kwang Soon Lee, Hyo Jin Ahn, Jay H. Lee

Research output: Contribution to journalArticlepeer-review

64 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds