Experiments on anisotropic etching of Si in TMAH

Jae Sung You, Donghwan Kim, Joo Youl Huh, Ho Joon Park, James Jungho Pak, Choon Sik Kang

Research output: Contribution to journalArticlepeer-review

78 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Experiments on anisotropic etching of Si in TMAH'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds