Fabrication and characterisation of CMOS compatible silicon nanowire biosensor

G. B. Kang, J. M. Park, S. G. Kim, J. G. Koo, J. H. Park, Y. S. Sohn, Y. T. Kim

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


A silicon nanowire (SiNW) biosensor for label-free and real-time detection has been fabricated by complementary metal-oxide semiconductor (CMOS) technology. For the detection of prostate-specific antigen (PSA) used as a biomarker of prostate cancer the SiNW surface was modified to immobilise the antibody of PSA (anti-PSA). Real-time monitoring reveals the change in conductivity of the SiNW on specific binding of PSA to anti-PSA. For 355 nm SiNW, the response to 10 ng/ml of PSA was 7.3%.

Original languageEnglish
JournalElectronics Letters
Issue number16
Publication statusPublished - 2008

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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