Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement

Jin Hyuk Kim, Sung Il Chu, Ho Won Seo, Jae Wook Ryu, Gyu-Tae Kim, Sung Moon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In this research we proposed, designed, fabricated, and measured a novel Micro Electro Mechanical System (MEMS) based vertical probe tips which differs from conventional cantilever probe tips. The main idea of the vertical probe design was how to distribute the total forces vertically concentrated on the probe tip in measuring semiconductor devices. To solve the problem, we designed the vertical probe tip with meander structure which could provide enough displacements so that the vertical probe tips could distribute the forces acting on the tips. The structural analyses of the probe tip were accomplished using finite element method (FEM) and compared with actual measurement values. The primary fabrication processes were surface micromachining, wafer bonding technology, and electroplating. The material of the electro-plated probe tip was an Ni-Co alloy. In this study, we demonstrated the potential of the vertical probe tip that could apply to a small area with the over drive (O.D.) of 10-40 μm and the contact force of 1-8 gf. The measured contact resistance was less than 2 Ω and little noise was observed.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages283-286
Number of pages4
Publication statusPublished - 2007 Dec 1
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 2007 Jan 212007 Jan 25

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period07/1/2107/1/25

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Kim, J. H., Chu, S. I., Seo, H. W., Ryu, J. W., Kim, G-T., & Moon, S. (2007). Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 283-286). [4432969]