Fabrication and characterization of a microsensor for detecting simultaneously both Earth's magnetic field and acceleration

Ji Man Cho, Kyoung Soo Kim, Sengdo An, Sang Yong Lee, Soo-Won Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents a resonant microsensor for detecting simultaneously both the Earth's magnetic field and its acceleration. The structure design is based on the Lorentz force and lateral driving. The process uses a silicon-on-glass wafer and gold-silicon eutectic bonding for the wafer-level hermetic packaging. A prototype sensor with resonant frequencies in a range of around 2 kHz shows Q factors of about 7. In total, 2 mW is consumed in the current driving element. When 1 g and 0.35 G were applied to the sensor, a sensitivity of 104 mVg and 5 mVG was measured.

Original languageEnglish
Pages (from-to)108-112
Number of pages5
JournalElectrochemical and Solid-State Letters
Volume10
Issue number9
DOIs
Publication statusPublished - 2007 Aug 1

Fingerprint

Microsensors
Silicon
Earth (planet)
wafers
Magnetic fields
Fabrication
Lorentz force
fabrication
sensors
Sensors
silicon
magnetic fields
packaging
Gold
eutectics
Eutectics
resonant frequencies
Q factors
Natural frequencies
Packaging

ASJC Scopus subject areas

  • Electrochemistry
  • Materials Science(all)

Cite this

Fabrication and characterization of a microsensor for detecting simultaneously both Earth's magnetic field and acceleration. / Cho, Ji Man; Kim, Kyoung Soo; An, Sengdo; Lee, Sang Yong; Kim, Soo-Won.

In: Electrochemical and Solid-State Letters, Vol. 10, No. 9, 01.08.2007, p. 108-112.

Research output: Contribution to journalArticle

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