Fabrication and characterization of carbon nanotube tip modified by focused ion beam

Chang Soo Han, Young Hyun Shin, Yu Hwan Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We described on the development of a scanning probe microscope tip with CNT (carbon nanotube). Dielectrophoresis was used for assembling the CNT on the sharp end of a Si AFM tip. To adjust the morphology of the CNT tip, focused ion beam (FIB) was systematically used. The straightness of the CNT tip was improved and its length was controlled by cutting a part of the CNT. Tip's characteristics in non-contact AFM(Atomic Force Microscopy) mode was mainly dealt with various experimental results such as wear, deep trench measurement, and high resolution imaging. Comparing to the conventional Si tip, a CNT-modified FIB tip was stronger to wear, more traceable to deep trench structure and more adaptable to figure out the fine structure like anodic aluminum oxide (AAO) structure. We expect that CNT-modified tip is very promising for industrial usage of AFM.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages290-293
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 2007 Jan 162007 Jan 19

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period07/1/1607/1/19

Keywords

  • AFM tip
  • Carbon nanotubes
  • Focuesd ion beam

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

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