Fabrication and characterization of DLC-coated field emitter array

Chang Gi Ko, Byeong Kwon Ju, Yun Hi Lee, Jung Ho Park, Myung Hwan Oh

Research output: Contribution to conferencePaperpeer-review

Abstract

We fabricated diamond-like-carbon (DLC) coated knife edge field emitter array (KEFEA) on the (110) oriented silicon wafer. The fabricated KEFEA have above six hundreds times of aspect ratio. Then we coated the KEFEA with 300 angstroms thick DLC film by PECVD method. And we measured the emission current from the KEFEA under vacuum pressure of around 2×10-7 torr. The threshold voltage of the DLC-coated KEFEA lowered about 200 V compared with the bare Si KEFEA. By coating the DLC film, it's emission stability was dramatically improved. A simulation on the emitter has been performed by using MAXWELL software.

Original languageEnglish
Pages226-230
Number of pages5
Publication statusPublished - 1996
EventProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia
Duration: 1996 Jul 71996 Jul 12

Other

OtherProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC
CitySt.Petersburg, Russia
Period96/7/796/7/12

ASJC Scopus subject areas

  • Surfaces and Interfaces

Fingerprint Dive into the research topics of 'Fabrication and characterization of DLC-coated field emitter array'. Together they form a unique fingerprint.

Cite this