Fabrication and characterization of DLC-coated field emitter array

Chang Gi Ko, Byeong Kwon Ju, Yun-Hi Lee, Jung ho Park, Myung Hwan Oh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We fabricated diamond-like-carbon (DLC) coated knife edge field emitter array (KEFEA) on the (110) oriented silicon wafer. The fabricated KEFEA have above six hundreds times of aspect ratio. Then we coated the KEFEA with 300 angstroms thick DLC film by PECVD method. And we measured the emission current from the KEFEA under vacuum pressure of around 2×10-7 torr. The threshold voltage of the DLC-coated KEFEA lowered about 200 V compared with the bare Si KEFEA. By coating the DLC film, it's emission stability was dramatically improved. A simulation on the emitter has been performed by using MAXWELL software.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Vacuum Microelectronics Conference, IVMC
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages226-230
Number of pages5
Publication statusPublished - 1996 Dec 1
Externally publishedYes
EventProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia
Duration: 1996 Jul 71996 Jul 12

Other

OtherProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC
CitySt.Petersburg, Russia
Period96/7/796/7/12

Fingerprint

emitters
diamonds
fabrication
carbon
threshold voltage
aspect ratio
wafers
computer programs
coatings
vacuum
silicon
simulation

ASJC Scopus subject areas

  • Surfaces and Interfaces

Cite this

Ko, C. G., Ju, B. K., Lee, Y-H., Park, J. H., & Oh, M. H. (1996). Fabrication and characterization of DLC-coated field emitter array. In Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC (pp. 226-230). Piscataway, NJ, United States: IEEE.

Fabrication and characterization of DLC-coated field emitter array. / Ko, Chang Gi; Ju, Byeong Kwon; Lee, Yun-Hi; Park, Jung ho; Oh, Myung Hwan.

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC. Piscataway, NJ, United States : IEEE, 1996. p. 226-230.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ko, CG, Ju, BK, Lee, Y-H, Park, JH & Oh, MH 1996, Fabrication and characterization of DLC-coated field emitter array. in Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC. IEEE, Piscataway, NJ, United States, pp. 226-230, Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC, St.Petersburg, Russia, 96/7/7.
Ko CG, Ju BK, Lee Y-H, Park JH, Oh MH. Fabrication and characterization of DLC-coated field emitter array. In Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC. Piscataway, NJ, United States: IEEE. 1996. p. 226-230
Ko, Chang Gi ; Ju, Byeong Kwon ; Lee, Yun-Hi ; Park, Jung ho ; Oh, Myung Hwan. / Fabrication and characterization of DLC-coated field emitter array. Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC. Piscataway, NJ, United States : IEEE, 1996. pp. 226-230
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