Fabrication and characterization of high current field emitters with silicon ball-tip pins

Baek Hyun Kim; Jae Wan Kwon; Emily A. Baxter; Scott D. Kovaleski

doi:10.1109/MEMSYS.2011.5734408

Fabrication and characterization of high current field emitters with silicon ball-tip pins

Baek Hyun Kim, Jae Wan Kwon, Emily A. Baxter, Scott D. Kovaleski

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper introduces a novel design of high current field emitters based on unique pin structures with a ball shaped tip. Our ball-tip pins provide relatively large surface area at the tip and increase the field enhancement factor regardless of dimension of the pin base. The ball-tip pins turn out to produce higher field emission current than that from the generic sharp-tip pins due to the significantly increased field emission sites at the ball-tip surface.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	249-252
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734408
Publication status	Published - 2011 Apr 13
Externally published	Yes
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

Fingerprint

Silicon

Field emission

high current

balls

emitters

Fabrication

fabrication

silicon

field emission

augmentation

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Cite this

Kim, B. H., Kwon, J. W., Baxter, E. A., & Kovaleski, S. D. (2011). Fabrication and characterization of high current field emitters with silicon ball-tip pins. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 249-252). [5734408] https://doi.org/10.1109/MEMSYS.2011.5734408

Fabrication and characterization of high current field emitters with silicon ball-tip pins. / Kim, Baek Hyun; Kwon, Jae Wan; Baxter, Emily A.; Kovaleski, Scott D.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 249-252 5734408.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kim, BH, Kwon, JW, Baxter, EA & Kovaleski, SD 2011, Fabrication and characterization of high current field emitters with silicon ball-tip pins. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734408, pp. 249-252, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734408

Kim BH, Kwon JW, Baxter EA, Kovaleski SD. Fabrication and characterization of high current field emitters with silicon ball-tip pins. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 249-252. 5734408 https://doi.org/10.1109/MEMSYS.2011.5734408

Kim, Baek Hyun ; Kwon, Jae Wan ; Baxter, Emily A. ; Kovaleski, Scott D. / Fabrication and characterization of high current field emitters with silicon ball-tip pins. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. pp. 249-252

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Access to Document

10.1109/MEMSYS.2011.5734408