Fabrication and field emission properties of poly-diamond films

Byeong Kwon Ju, Yun-Hi Lee, Myung Hwan Oh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

By using a substrate transferring technique, poly-diamond thick films having a smooth or rough surface could be fabricated as field emitter materials. The diamond film with a smooth surface, which was transferred from the interface between the (100) Si substrate and poly-diamond deposited by plasma-enhanced CVD, showed better field emission properties in terms of emission current density with improved vacuum level dependence as compared with original poly-diamond film from a rough surface.

Original languageEnglish
Pages (from-to)855-859
Number of pages5
JournalMicroelectronics Journal
Volume29
Issue number11
Publication statusPublished - 1998 Nov 1
Externally publishedYes

Keywords

  • Diamond
  • Field emission
  • Film

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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