Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Chulmin Choi, Kunbae Noh, Young Oh, Cihan Kuru, Daehoon Hong, Li Han Chen, Sy Hwang Liou, Tae Yeon Seong, Sungho Jin

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

Original languageEnglish
Article number6027682
Pages (from-to)2532-2535
Number of pages4
JournalIEEE Transactions on Magnetics
Volume47
Issue number10
DOIs
Publication statusPublished - 2011 Oct 1

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Magnetic recording
Multilayer films
Ion implantation
Magnetic properties
Magnetic anisotropy
Ions
Fabrication
Polymers
Geometry
Coercive force
Substrates

Keywords

  • Ion implantation
  • nanolithography
  • perpendicular magnetic recording

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media. / Choi, Chulmin; Noh, Kunbae; Oh, Young; Kuru, Cihan; Hong, Daehoon; Chen, Li Han; Liou, Sy Hwang; Seong, Tae Yeon; Jin, Sungho.

In: IEEE Transactions on Magnetics, Vol. 47, No. 10, 6027682, 01.10.2011, p. 2532-2535.

Research output: Contribution to journalArticle

Choi, Chulmin ; Noh, Kunbae ; Oh, Young ; Kuru, Cihan ; Hong, Daehoon ; Chen, Li Han ; Liou, Sy Hwang ; Seong, Tae Yeon ; Jin, Sungho. / Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media. In: IEEE Transactions on Magnetics. 2011 ; Vol. 47, No. 10. pp. 2532-2535.
@article{db86cd7e27e4495ebcd69ef4dfefe334,
title = "Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media",
abstract = "We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.",
keywords = "Ion implantation, nanolithography, perpendicular magnetic recording",
author = "Chulmin Choi and Kunbae Noh and Young Oh and Cihan Kuru and Daehoon Hong and Chen, {Li Han} and Liou, {Sy Hwang} and Seong, {Tae Yeon} and Sungho Jin",
year = "2011",
month = "10",
day = "1",
doi = "10.1109/TMAG.2011.2158197",
language = "English",
volume = "47",
pages = "2532--2535",
journal = "IEEE Transactions on Magnetics",
issn = "0018-9464",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "10",

}

TY - JOUR

T1 - Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

AU - Choi, Chulmin

AU - Noh, Kunbae

AU - Oh, Young

AU - Kuru, Cihan

AU - Hong, Daehoon

AU - Chen, Li Han

AU - Liou, Sy Hwang

AU - Seong, Tae Yeon

AU - Jin, Sungho

PY - 2011/10/1

Y1 - 2011/10/1

N2 - We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

AB - We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

KW - Ion implantation

KW - nanolithography

KW - perpendicular magnetic recording

UR - http://www.scopus.com/inward/record.url?scp=80053473789&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80053473789&partnerID=8YFLogxK

U2 - 10.1109/TMAG.2011.2158197

DO - 10.1109/TMAG.2011.2158197

M3 - Article

VL - 47

SP - 2532

EP - 2535

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

SN - 0018-9464

IS - 10

M1 - 6027682

ER -