Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Chulmin Choi, Kunbae Noh, Young Oh, Cihan Kuru, Daehoon Hong, Li Han Chen, Sy Hwang Liou, Tae Yeon Seong, Sungho Jin

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

Original languageEnglish
Article number6027682
Pages (from-to)2532-2535
Number of pages4
JournalIEEE Transactions on Magnetics
Volume47
Issue number10
DOIs
Publication statusPublished - 2011 Oct

Keywords

  • Ion implantation
  • nanolithography
  • perpendicular magnetic recording

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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