Fabrication and near-field visualization of a wafer-scale dense plasmonic nanostructured array

Jungheum Yun, Haemi Lee, Chaewon Mun, Junghoon Jahng, William A. Morrison, Derek B. Nowak, Jung Hwan Song, Dong-Kwon Lim, Tae Sung Bae, Hyung Min Kim, Nam Hoon Kim, Sang Hwan Nam, Jongwoo Kim, Min Kyo Seo, Dong Ho Kim, Sung Gyu Park, Yung Doug Suh

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4 Citations (Scopus)


Developing a sensor that identifies and quantifies trace amounts of analyte molecules is crucially important for widespread applications, especially in the areas of chemical and biological detection. By non-invasively identifying the vibrational signatures of the target molecules, surface-enhanced Raman scattering (SERS) has been widely employed as a tool for molecular detection. Here, we report on the reproducible fabrication of wafer-scale dense SERS arrays and single-nanogap level near-field imaging of these dense arrays under ambient conditions. Plasmonic nanogaps densely populated the spaces among globular Ag nanoparticles with an areal density of 120 particles per μm 2 upon application of a nanolithography-free simple process consisting of the Ar plasma treatment of a polyethylene terephthalate substrate and subsequent Ag sputter deposition. The compact nanogaps produced a high SERS enhancement factor of 3.3 × 10 7 and homogeneous (coefficient of variation of 8.1%) SERS response. The local near fields at these nanogaps were visualized using photo-induced force microscopy that simultaneously enabled near-field excitation and near-field force detection under ambient conditions. A high spatial resolution of 3.1 nm was achieved. Taken together, the generation of a large-area SERS array with dense plasmonic nanogaps and the subsequent single-nanogap level characterization of the local near field have profound implications in the nanoplasmonic imaging and sensing applications.

Original languageEnglish
Pages (from-to)6444-6451
Number of pages8
JournalRSC Advances
Issue number12
Publication statusPublished - 2018 Jan 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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    Yun, J., Lee, H., Mun, C., Jahng, J., Morrison, W. A., Nowak, D. B., Song, J. H., Lim, D-K., Bae, T. S., Kim, H. M., Kim, N. H., Nam, S. H., Kim, J., Seo, M. K., Kim, D. H., Park, S. G., & Suh, Y. D. (2018). Fabrication and near-field visualization of a wafer-scale dense plasmonic nanostructured array. RSC Advances, 8(12), 6444-6451. https://doi.org/10.1039/c7ra13322g