Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

Jong Yeon Park, Kun Tae Kim, Sung Moon, Jong Oh Park, Myung Hwan Oh, James Jungho Pak

Research output: Contribution to journalArticle

Abstract

A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 μm sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication.

Original languageEnglish
Pages (from-to)377-387
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4592
DOIs
Publication statusPublished - 2001

Keywords

  • 3D MEMS Antenna
  • 3D UV-Lithography
  • HARS
  • IR image sensor
  • Microbolometer
  • MRPBI

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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