Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

Jong Yeon Park, Kun Tae Kim, Sung Moon, Jong Oh Park, Myung Hwan Oh, James Jungho Pak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 μm sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.C. Chiao, L. Faraone, H. Barry Harrison, A.M. Shkel
Pages377-387
Number of pages11
Volume4592
DOIs
Publication statusPublished - 2001
EventDevice and Process Technologies for MEMS and Microelectronics II - Adelaide, Australia
Duration: 2001 Dec 172001 Dec 19

Other

OtherDevice and Process Technologies for MEMS and Microelectronics II
CountryAustralia
CityAdelaide
Period01/12/1701/12/19

Fingerprint

illuminators
antenna arrays
Antenna feeders
Antenna arrays
microelectromechanical systems
MEMS
Mirrors
mirrors
Fabrication
fabrication
Antennas
antennas
MOEMS
microoptoelectromechanical systems
high aspect ratio
Aspect ratio
simulators
Simulators

Keywords

  • 3D MEMS Antenna
  • 3D UV-Lithography
  • HARS
  • IR image sensor
  • Microbolometer
  • MRPBI

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Park, J. Y., Kim, K. T., Moon, S., Park, J. O., Oh, M. H., & Pak, J. J. (2001). Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer. In J. C. Chiao, L. Faraone, H. Barry Harrison, & A. M. Shkel (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4592, pp. 377-387) https://doi.org/10.1117/12.448991

Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer. / Park, Jong Yeon; Kim, Kun Tae; Moon, Sung; Park, Jong Oh; Oh, Myung Hwan; Pak, James Jungho.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.C. Chiao; L. Faraone; H. Barry Harrison; A.M. Shkel. Vol. 4592 2001. p. 377-387.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, JY, Kim, KT, Moon, S, Park, JO, Oh, MH & Pak, JJ 2001, Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer. in JC Chiao, L Faraone, H Barry Harrison & AM Shkel (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4592, pp. 377-387, Device and Process Technologies for MEMS and Microelectronics II, Adelaide, Australia, 01/12/17. https://doi.org/10.1117/12.448991
Park JY, Kim KT, Moon S, Park JO, Oh MH, Pak JJ. Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer. In Chiao JC, Faraone L, Barry Harrison H, Shkel AM, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4592. 2001. p. 377-387 https://doi.org/10.1117/12.448991
Park, Jong Yeon ; Kim, Kun Tae ; Moon, Sung ; Park, Jong Oh ; Oh, Myung Hwan ; Pak, James Jungho. / Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.C. Chiao ; L. Faraone ; H. Barry Harrison ; A.M. Shkel. Vol. 4592 2001. pp. 377-387
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