Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Seung Min Oh, Min Gyu Kang, Young Ho Do, Chong Yun Kang, Seok Jin Yoon, Sahn Nahm

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO<inf>2</inf>/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a P<inf>r</inf> of 40.5 μC/cm<sup>2</sup> and an E<inf>c</inf> of 156 kV/cm.

Original languageEnglish
Pages (from-to)222-225
Number of pages4
JournalTransactions on Electrical and Electronic Materials
Volume12
Issue number5
DOIs
Publication statusPublished - 2011

Keywords

  • Lead zirconate titanate
  • Poly(vinylpyrrolidone)
  • Sol-gel
  • Thickness control

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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