Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography

Heon Lee, Joo Youl Huh, K. Y. Yang, S. Hong, G. Y. Jung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A faithful pattern transferring onto a non-planar substrate was demonstrated by nano-imprinting technique. Uniform pressing of a flexible template onto a substrate was important for the faithful pattern transferring. Both the UV-based and thermal imprinting techniques were used to transfer patterns of 200nm sized features to the non-planar substrates such as outer wall of rod and inner surface of cylinder and it could be used for nano-devices such as lab on a chip.

Original languageEnglish
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
Pages665-668
Number of pages4
Volume121-123
EditionPART 1
Publication statusPublished - 2007 Dec 1
EventChina International Conference on Nanoscience and Technology, ChinaNANO 2005 - Beijing, China
Duration: 2005 Jun 92005 Jun 11

Publication series

NameDiffusion and Defect Data Pt.B: Solid State Phenomena
NumberPART 1
Volume121-123
ISSN (Print)10120394

Other

OtherChina International Conference on Nanoscience and Technology, ChinaNANO 2005
CountryChina
CityBeijing
Period05/6/905/6/11

Fingerprint

Lithography
lithography
Fabrication
fabrication
Substrates
Lab-on-a-chip
pressing
rods
templates
chips
Hot Temperature

Keywords

  • Flexible template
  • Nano -pattern duplication
  • Nano-imprint lithography
  • Polymer template
  • Thermally curable monomer resin
  • UV curable monomer resin

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Lee, H., Huh, J. Y., Yang, K. Y., Hong, S., & Jung, G. Y. (2007). Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography. In Diffusion and Defect Data Pt.B: Solid State Phenomena (PART 1 ed., Vol. 121-123, pp. 665-668). (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 121-123, No. PART 1).

Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography. / Lee, Heon; Huh, Joo Youl; Yang, K. Y.; Hong, S.; Jung, G. Y.

Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 121-123 PART 1. ed. 2007. p. 665-668 (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 121-123, No. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, H, Huh, JY, Yang, KY, Hong, S & Jung, GY 2007, Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography. in Diffusion and Defect Data Pt.B: Solid State Phenomena. PART 1 edn, vol. 121-123, Diffusion and Defect Data Pt.B: Solid State Phenomena, no. PART 1, vol. 121-123, pp. 665-668, China International Conference on Nanoscience and Technology, ChinaNANO 2005, Beijing, China, 05/6/9.
Lee H, Huh JY, Yang KY, Hong S, Jung GY. Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography. In Diffusion and Defect Data Pt.B: Solid State Phenomena. PART 1 ed. Vol. 121-123. 2007. p. 665-668. (Diffusion and Defect Data Pt.B: Solid State Phenomena; PART 1).
Lee, Heon ; Huh, Joo Youl ; Yang, K. Y. ; Hong, S. ; Jung, G. Y. / Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography. Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 121-123 PART 1. ed. 2007. pp. 665-668 (Diffusion and Defect Data Pt.B: Solid State Phenomena; PART 1).
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