Fabrication of 2D photonic crystal assisted Y2O 3:Eu3+ thin-film phosphors by direct nano-imprinting

Ki Young Ko, Eun Jin Her, William T. Nichols, Heon Lee, Young Rag Do, Jinho Ahn

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O 3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O 3:Eu3+ sol into a Y2O3:Eu 3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O 3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y 2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.

Original languageEnglish
Pages (from-to)2930-2933
Number of pages4
JournalMicroelectronic Engineering
Issue number9
Publication statusPublished - 2011 Sept


  • Nano-imprint
  • PDMS stamp
  • Photonic crystal
  • Sol-gel
  • Thin-film phosphor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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