Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (Mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage

Jong Yeon Park, Kun Tae Kim, Sung Moon, James Jungho Pak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 μm sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages113-124
Number of pages12
Volume687
Publication statusPublished - 2002
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States
Duration: 2001 Nov 252001 Nov 28

Other

OtherMaterials Science of Microelectromechanical Systems (MEMS) Devices IV
CountryUnited States
CityBoston, MA
Period01/11/2501/11/28

Fingerprint

Antenna feeders
Antenna arrays
MEMS
Mirrors
Fabrication
Antennas
MOEMS
Aspect ratio
Simulators

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (Mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage. / Park, Jong Yeon; Kim, Kun Tae; Moon, Sung; Pak, James Jungho.

Materials Research Society Symposium - Proceedings. Vol. 687 2002. p. 113-124.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, JY, Kim, KT, Moon, S & Pak, JJ 2002, Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (Mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage. in Materials Research Society Symposium - Proceedings. vol. 687, pp. 113-124, Materials Science of Microelectromechanical Systems (MEMS) Devices IV, Boston, MA, United States, 01/11/25.
Park, Jong Yeon ; Kim, Kun Tae ; Moon, Sung ; Pak, James Jungho. / Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (Mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage. Materials Research Society Symposium - Proceedings. Vol. 687 2002. pp. 113-124
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abstract = "A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 μm sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication.",
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