Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique

Jong Yeon Park, Kun Tae Kim, Sung Moon, James Jungho Pak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The fabrication of three-dimensional microelectromechanical systems (MEMS) antenna array for infrared detector was described using novel ultraviolet-lithography apparatus, plastic micro machining and micro assembly technique. The feasibility of fabricating both a three-dimensional feed horn MEMS antenna and a mold array was also demonstrated. It was observed that the mask coupled with a wafer could be employed in a two way fixed vacuum. It was shown that the mesh structure bonding (MSB) technique could be used to produce low temperature bonding, thickness control of bonding material and detail bonding of mesh structure.

Original languageEnglish
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages498-501
Number of pages4
Volume1
Publication statusPublished - 2003 Dec 1
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: 2003 Feb 232003 Feb 27

Other

Other2003 Nanotechnology Conference and Trade Show - Nanotech 2003
CountryUnited States
CitySan Francisco, CA
Period03/2/2303/2/27

Keywords

  • 3D MEMS
  • PDMS
  • Plastic Micromachining
  • UV-Lithography

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Park, J. Y., Kim, K. T., Moon, S., & Pak, J. J. (2003). Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique. In M. Laudon, & B. Romanowicz (Eds.), 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 (Vol. 1, pp. 498-501)