@inproceedings{e0a8da7b4b0b4aed8c0259b2864a52f3,
title = "Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique",
abstract = "The fabrication of three-dimensional microelectromechanical systems (MEMS) antenna array for infrared detector was described using novel ultraviolet-lithography apparatus, plastic micro machining and micro assembly technique. The feasibility of fabricating both a three-dimensional feed horn MEMS antenna and a mold array was also demonstrated. It was observed that the mask coupled with a wafer could be employed in a two way fixed vacuum. It was shown that the mesh structure bonding (MSB) technique could be used to produce low temperature bonding, thickness control of bonding material and detail bonding of mesh structure.",
keywords = "3D MEMS, PDMS, Plastic Micromachining, UV-Lithography",
author = "Park, {Jong Yeon} and Kim, {Kun Tae} and Sung Moon and Pak, {James Jungho}",
year = "2003",
language = "English",
isbn = "0972842209",
series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
pages = "498--501",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",
}