Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique

Jong Yeon Park, Kun Tae Kim, Sung Moon, James Jungho Pak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique'. Together they form a unique fingerprint.

Engineering & Materials Science