Fabrication of 3D nano-structures using reverse imprint lithography

Kang Soo Han, Sung Hoon Hong, Kang In Kim, Joong Yeon Cho, Kyung Woo Choi, Heon Lee

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

In spite of the fact that the fabrication process of three-dimensional nano-structures is complicated and expensive, it can be applied to a range of devices to increase their efficiency and sensitivity. Simple and inexpensive fabrication of three-dimensional nano-structures is necessary. In this study, reverse imprint lithography (RIL) with UV-curable benzylmethacrylate, methacryloxypropyl terminated poly-dimethylsiloxane (M-PDMS) resin and ZnO-nano-particle-dispersed resin was used to fabricate three-dimensional nano-structures. UV-curable resins were placed between a silicon stamp and a PVA transfer template, followed by a UV curing process. Then, the silicon stamp was detached and a 2D pattern layer was transferred to the substrate using diluted UV-curable glue. Consequently, three-dimensional nano-structures were formed by stacking the two-dimensional nano-patterned layers. RIL was applied to a light-emitting diode (LED) to evaluate the optical effects of a nano-patterned layer. As a result, the light extraction of the patterned LED was increased by about 12% compared to an unpatterned LED.

Original languageEnglish
Article number045304
JournalNanotechnology
Volume24
Issue number4
DOIs
Publication statusPublished - 2013 Feb 1

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Lithography
Light emitting diodes
Resins
Silicon
Light
Fabrication
Glues
Polydimethylsiloxane
Curing
Adhesives
Substrates
Equipment and Supplies
baysilon

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)

Cite this

Fabrication of 3D nano-structures using reverse imprint lithography. / Han, Kang Soo; Hong, Sung Hoon; Kim, Kang In; Cho, Joong Yeon; Choi, Kyung Woo; Lee, Heon.

In: Nanotechnology, Vol. 24, No. 4, 045304, 01.02.2013.

Research output: Contribution to journalArticle

Han, Kang Soo ; Hong, Sung Hoon ; Kim, Kang In ; Cho, Joong Yeon ; Choi, Kyung Woo ; Lee, Heon. / Fabrication of 3D nano-structures using reverse imprint lithography. In: Nanotechnology. 2013 ; Vol. 24, No. 4.
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