Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography

Jong Hwa Lee, Ki yeon Yang, Sung Hoon Hong, Heon Lee, Kyung Woo Choi

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

As a promising substrate for various kinds of devices, polyethylene-terephthalate (PET) film has many advantages in terms of transparency, flexibility, chemical stability, thermal resistance, mechanical strength and low fabrication cost. In order to build actual device structure on PET substrate, micro to nanometer scale patterns of functional material have to be formed. In this work, 70 nm sized resist patterns with near zero residual layer were made on PET film, using nanoimprint lithography process, based on 'partial filling effect'. After brief oxygen plasma treatment and e-beam evaporation of functional materials such as Cr metal, resist patterns were lifted-off with acetone solution and 70 nm sized Cr nanowire structure was uniformly formed on flexible PET substrate.

Original languageEnglish
Pages (from-to)710-713
Number of pages4
JournalMicroelectronic Engineering
Volume85
Issue number4
DOIs
Publication statusPublished - 2008 Apr 1

Fingerprint

Nanoimprint lithography
Polyethylene Terephthalates
polyethylene terephthalate
Polyethylene terephthalates
Nanowires
nanowires
lithography
Metals
Fabrication
fabrication
Functional materials
metals
Substrates
Chemical stability
oxygen plasma
thermal resistance
Acetone
Heat resistance
Transparency
acetone

Keywords

  • Lift-off
  • Metal nanowire
  • Nanoimprint
  • Partial filling effect
  • PET film
  • PMMA

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography. / Lee, Jong Hwa; Yang, Ki yeon; Hong, Sung Hoon; Lee, Heon; Choi, Kyung Woo.

In: Microelectronic Engineering, Vol. 85, No. 4, 01.04.2008, p. 710-713.

Research output: Contribution to journalArticle

Lee, Jong Hwa ; Yang, Ki yeon ; Hong, Sung Hoon ; Lee, Heon ; Choi, Kyung Woo. / Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography. In: Microelectronic Engineering. 2008 ; Vol. 85, No. 4. pp. 710-713.
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