We first report on the fabrication of all solid-state thin-film battery (TFB) using a LiNiO2 cathode. The LiNiO2 film is grown by radio frequency magnetron reactive sputtering using a synthesized LiNiO2 target in a [O2/(Ar + O2)] ratio of 0.1. The LiNiO2 is then rapid thermal annealed at 700°C for 10 min in an oxygen atmosphere. X-ray diffraction results show that the as-deposited amorphous LiNiO2 becomes crystallized when rapid thermal annealed at 700°C. It is shown that the TFB made with the rapid thermal annealed LiNiO2 cathode (1.13 μm thick) exhibits fairly stable cyclability with a capacity of 60 μAh. These findings indicate that the rapid thermal annealed LiNiO2 can be a promising cathode material for the fabrication of high performance TFBs.
ASJC Scopus subject areas
- Materials Science(all)