Fabrication of a thin film battery using a rapid-thermal-annealed LiNiO2 cathode

Han Ki Kim; Tae Yeon Seong; Young Soo Yoon

doi:10.1149/1.1510323

Fabrication of a thin film battery using a rapid-thermal-annealed LiNiO₂ cathode

Han Ki Kim, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

We first report on the fabrication of all solid-state thin-film battery (TFB) using a LiNiO₂ cathode. The LiNiO₂ film is grown by radio frequency magnetron reactive sputtering using a synthesized LiNiO₂ target in a [O₂/(Ar + O₂)] ratio of 0.1. The LiNiO₂ is then rapid thermal annealed at 700°C for 10 min in an oxygen atmosphere. X-ray diffraction results show that the as-deposited amorphous LiNiO₂ becomes crystallized when rapid thermal annealed at 700°C. It is shown that the TFB made with the rapid thermal annealed LiNiO₂ cathode (1.13 μm thick) exhibits fairly stable cyclability with a capacity of 60 μAh. These findings indicate that the rapid thermal annealed LiNiO₂ can be a promising cathode material for the fabrication of high performance TFBs.

Original language	English
Pages (from-to)	A252-A255
Journal	Electrochemical and Solid-State Letters
Volume	5
Issue number	11
DOIs	https://doi.org/10.1149/1.1510323
Publication status	Published - 2002 Nov
Externally published	Yes

ASJC Scopus subject areas

Chemical Engineering(all)
Materials Science(all)
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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abstract = "We first report on the fabrication of all solid-state thin-film battery (TFB) using a LiNiO2 cathode. The LiNiO2 film is grown by radio frequency magnetron reactive sputtering using a synthesized LiNiO2 target in a [O2/(Ar + O2)] ratio of 0.1. The LiNiO2 is then rapid thermal annealed at 700°C for 10 min in an oxygen atmosphere. X-ray diffraction results show that the as-deposited amorphous LiNiO2 becomes crystallized when rapid thermal annealed at 700°C. It is shown that the TFB made with the rapid thermal annealed LiNiO2 cathode (1.13 μm thick) exhibits fairly stable cyclability with a capacity of 60 μAh. These findings indicate that the rapid thermal annealed LiNiO2 can be a promising cathode material for the fabrication of high performance TFBs.",

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AU - Kim, Han Ki

AU - Seong, Tae Yeon

AU - Yoon, Young Soo

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Y1 - 2002/11

N2 - We first report on the fabrication of all solid-state thin-film battery (TFB) using a LiNiO2 cathode. The LiNiO2 film is grown by radio frequency magnetron reactive sputtering using a synthesized LiNiO2 target in a [O2/(Ar + O2)] ratio of 0.1. The LiNiO2 is then rapid thermal annealed at 700°C for 10 min in an oxygen atmosphere. X-ray diffraction results show that the as-deposited amorphous LiNiO2 becomes crystallized when rapid thermal annealed at 700°C. It is shown that the TFB made with the rapid thermal annealed LiNiO2 cathode (1.13 μm thick) exhibits fairly stable cyclability with a capacity of 60 μAh. These findings indicate that the rapid thermal annealed LiNiO2 can be a promising cathode material for the fabrication of high performance TFBs.

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Fabrication of a thin film battery using a rapid-thermal-annealed LiNiO₂ cathode

Abstract

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