Fabrication of aluminum nano-scale structures using direct-embossing with a nickel template

Sang Chul Oh, Byeong Ju Bae, Ki Yeon Yang, Moo Hyun Kwon, Heon Lee

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Al plate was patterned by a direct embossing process. An electroformed Ni plate with a nano-sized surface protrusion pattern was used as an embossing mold. The Ni stamp with a nano-sized surface protrusion pattern was pressed onto an electro-polished Al plate; thus, a reversed Al nano-pattern was formed on the Al surface by the localized plastic deformation of Al. The Al plate was softened by annealing at 400 °C for 5 min; thus, high-fidelity pattern transfer was achieved at a low embossing pressure.

Original languageEnglish
Pages (from-to)771-775
Number of pages5
JournalMetals and Materials International
Volume17
Issue number5
DOIs
Publication statusPublished - 2011 Oct 1

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Keywords

  • Annealing
  • Deformation
  • Extrusion
  • Metals
  • Scanning electron microscopy (SEM)

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Metals and Alloys
  • Mechanics of Materials
  • Materials Chemistry

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