Fabrication of carbon nanotube sensor device by inkjet printing

Ju Hyung Yun, Chang-Soo Han, Joondong Kim, Jin Won Song, Dong Hun Shin, Young Geun Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

To overcome the limitation of conventional carbon nanotube fabrication techniques, inkjet printing was directly utilized on a whole wafer. In this work, inkjet printing method was used as a strong technique for the massive production of gas sensor applications. As a single wafer processing, it provided the great potential to fabricate uniform and reproducible single walled carbon nanotube (SWCNT) films on desired positions in terms of electrical characteristics and gas reaction performances. In order to secure good electrical contact between SWCNTs and the metal electrode, SWCNTs were firstly printed on a wafer with insulation layer, and then the metal electrodes were patterned by using lift-off process. The fabricated gaps of the electrodes were 2, 4, and 8 m, respectively. SWCNT films contacted tightly beneath the electrode show low and uniform electrical resistance values of 96-281 and reliable gas detection performances as well. In this work, As-deposited devices exhibit about 3% sensitivities to 100ppb - NO2 in 10 minutes and increased up to 9% by the annealing treatments at 400°C.

Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
Pages506-509
Number of pages4
DOIs
Publication statusPublished - 2008 Sep 1
Externally publishedYes
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 2008 Jan 62008 Jan 9

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
CountryChina
CitySanya
Period08/1/608/1/9

Keywords

  • Carbon nanotube
  • Gas sensor
  • Inkjet printing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Yun, J. H., Han, C-S., Kim, J., Song, J. W., Shin, D. H., & Park, Y. G. (2008). Fabrication of carbon nanotube sensor device by inkjet printing. In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS (pp. 506-509). [4484382] https://doi.org/10.1109/NEMS.2008.4484382